News

Non-Contact Wafer Transfer
2014-07-21
Purpose:
    To transfer wafers from standard 25-slot cassette to custom 13-slot cassette.

Capacity:
    Transfer duration < 15s for single batch.

Wafer Size:
     8"

Adventage:
    1. Decrease loss from mis-operation.
    2. Decrease particle comtamination.
    3. HMI control, recipe settings, data logging...

3D Diagram:

                  

Animation: